Nova Unveiled its Next Generation Modeling Engine for 3D semiconductors metrology
8 July, 2013
The new NovaMARS modeling engine enables control over weak parameters in complex 3D structures such as VNAND memory cells or FinFET logics
Nova Measuring Instruments from Rehovot, Israel, introduced its next generation NovaMARS 6.0 optical CD application development solution.
“With the growing pace of technology development and in light of shortened new technology node introduction cycles, the need for fast production ramp up with high yields is becoming”, said Dr. Shay Wolfling, Chief Technology Officer of Nova. ““This major product introduction is part of our strategic development focus on software solutions that helps customers meet the increasing process complexity and challenges in advanced technology nodes.”
The full suite of advanced metrology techniques included in NovaMARS 6.0 enables control over weak parameters in complex 3D structures such as VNAND memory cells or FinFET logic structures by extracting more structure shape parameters for the most complex geometries. The new NovaMARS 6.0 modeling software is compatible with new and legacy Nova metrology platforms.