Nova is Aiming the Emerging Market of GAA Transistors
24 February, 2022
"Nova's portfolio is built to meet the challenges of next-generation device fabrication," said Eitan Oppenhaim, President and CEO
Nova from Rehovot, Israel, announced a series of updates to its metrology solutions for semiconductor fabrication, that prepares them for the production of the newly gate-all-around (GAA) technology. “To address GAA needs, process control solutions must be more accurate and applicable for complex 3D structures and new materials, applied to more layers and utilized to more physical and chemical inline parameters.”
Gate-all-around, or GAA transistors, are a modified transistor structure where the gate contacts the channel from all sides and enables continued scaling. Unlike finFETs, where higher current requires multiple side-by-side fins, the current-carrying capacity of GAA transistors is increased by stacking several nanosheets vertically, while the gate is wrapped around these channels. GAA transistors are generally considered as successors to FinFETs, because they can be scaled to the specific performance required, and allows the creation on 3nm transistors.
The updates were added to all its mainstream systems: spectral interferometry system Nova PRISM, the integrated metrology platform Nova i570, providing high-volume profiles of the materials composition through Nova METRION system, the Raman spectroscopy system Nova ELIPSON and the in-die X-ray photoelectron spectroscopy system Nova VERAFLEX IV. Above all Nova announced that all these systems are are unified by the new machine learning software suite, Nova FIT 2.0.
As part of its GAA strategy, Nova recently added chemical metrology capability by acquiring ancosys GmbH, a privately held company headquartered in Germany. The transaction is valued at approximately $90 million, which is paid in cash, and includes a performance-based earnout of approximately $10 million. “Nova’s portfolio is built to meet the challenges of next-generation device fabrication,” said Eitan Oppenhaim, President and CEO.